Overview
The Royce Physical Vapour Deposition and Characterisation Facility is a state-of-the-art facility for thin-film deposition and device fabrication. All equipment is shared and owned by the Department of Materials Science & Metallurgy and supported by expert Technical Staff associated with several groups across the Department including the DMG, CMP, WEMs and 2D Materials & Devices.
For more information click here or here to Book a CMP Royce Facility
For funding opportunities, please refer to the Henry Royce Institute website.
Current Price List
Equipment
AJA Sputtering systemHighly versatile RF and DC magnetron sputtering system, very good for superconducting films such as Nb
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Custom sputtering systemsThe facility hosts 4 custom built DC magnetron sputtering systems
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Electron beam evaporator
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Argon ion millerThe argon ion miller allows for anisotropic and non-selective etching of devices. Suitable for metallic or insulating materials. |
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Atomic force microscopeA Bruker Multimode 8 with Nanoscope 5 controller. Has several different modes of operation.
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Electron-beam lithography systemLEO /ZEISS 1455VP scanning electron microscope equipped with Raith Elphy Quantum for device fabrication.
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Cryogenic DC/RF Probe stationLake Shore Cryogenics CRX-6.5K
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